Magnetic force carrier and ring for a polishing apparatus
US6059638A · kind A · utility
48Cited by
2References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 25, 1999 |
| Grant date | May 9, 2000 |
| Priority date | — |
| Expiry date | Jan 25, 2019 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24B37/30
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
The present invention provides a polishing apparatus having a drive motor, a carrier head and a polishing platen with a magnetic region formed in either the carrier head or the polishing platen. The magnetic region is configured to create an attracting force between the carrier head and the polishing platen. The drive motor is capable of producing a rotational polishing force. The carrier head is configured to retain an object to be polished, while the polishing platen has a polishing pad and is juxtaposed the carrier head.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.