Cross flow centrifugal processor
US6062239A · kind A · utility
10Cited by
85References
23Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 30, 1998 |
| Grant date | May 16, 2000 |
| Priority date | — |
| Expiry date | Jun 30, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/162
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A centrifugal processor for processing flat media, such as silicon wafers, has a rotor rotatably mounted within a rotor housing. Fan blades on the rotor blow air over the wafers, to move any remaining fluid droplets away from the wafer centers, to allow centrifugal force to fling the fluid droplets off of the wafers. The centrifugal processor uses clean room air, rather than nitrogen, for drying. Operating costs are reduced while manufacturing yields are increased, as spotting at the wafer centers is avoided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.