Multi-level substrate processing apparatus
US6062798A · kind A · utility
118Cited by
32References
43Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 13, 1996 |
| Grant date | May 16, 2000 |
| Priority date | — |
| Expiry date | Jun 13, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/139
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A substrate processing apparatus having a substrate transport and substrate processing chambers. The substrate transport has a transport chamber and a transport mechanism. The transport mechanism has a rotatable drive, an arm pivotably connected to the drive to pivot in vertical directions, and a substrate holder pivotably connected to an end of the arm by an articulating wrist. The arm can vertically move the substrate holder up and down. The substrate processing chambers are stationarily connected to the transport chamber at two different vertical levels.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.