Dry powder deposition apparatus
US6063194A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 10, 1998 |
| Grant date | May 16, 2000 |
| Priority date | — |
| Expiry date | Jun 10, 2018 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB05B5/08
- WIPO fieldPharmaceuticals
- WIPO sectorChemistry
Abstract
Provided is, among other things, a dry deposition apparatus for depositing grains on a substrate comprising: PA1 an electrostatic chuck having one or more collection zones, wherein the substrate is layered on the chuck for processing; PA1 a charged grain delivery apparatus for directing charged grains for electrostatic deposition on the substrate at the locations of the collection zones; and PA1 an optical detection device for quantifying the amount of grains deposited.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.