Patent · US Expired

Dry powder deposition apparatus

US6063194A · kind A · utility

26Cited by
26References
24Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 10, 1998
Grant dateMay 16, 2000
Priority date
Expiry dateJun 10, 2018

Classification

  • Technology area (CPC B)Performing Operations; Transporting
  • CPC primaryB05B5/08
  • WIPO fieldPharmaceuticals
  • WIPO sectorChemistry

Abstract

Provided is, among other things, a dry deposition apparatus for depositing grains on a substrate comprising: PA1 an electrostatic chuck having one or more collection zones, wherein the substrate is layered on the chuck for processing; PA1 a charged grain delivery apparatus for directing charged grains for electrostatic deposition on the substrate at the locations of the collection zones; and PA1 an optical detection device for quantifying the amount of grains deposited.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.