Position calibrating method for optical measuring apparatus
US6067165A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Sep 11, 1998 |
| Grant date | May 23, 2000 |
| Priority date | — |
| Expiry date | Sep 11, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B21/042
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In an optical measuring apparatus so structured as to hold a CCD camera and a laser displacement gauge so that they can be three-dimensionally driven at the same time on a stage, a jig including two straight, non-parallel line segments which can be measured by the CCD camera and the laser displacement gauge in the projection plane along the Z-axis direction is mounted on the stage; the straight line segments are measured in the projection plane by the CCD camera and the laser displacement gauge to obtain formulas of these segments; the obtained formulas are subjected to the arithmetic operation to calculate an offset value of the X and Y plane coordinate centers between the CCD camera and the laser displacement gauge; and the offset value is used as position calibration data of the CCD camera and the laser displacement gauge to perform position calibration of the measurement data.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.