Micromachined vibratory rate gyroscope
US6067858A · kind A · utility
210Cited by
24References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 30, 1997 |
| Grant date | May 30, 2000 |
| Priority date | — |
| Expiry date | May 30, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5719
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A microfabricated gyroscope to measure rotation about an axis parallel to the surface of the substrate. A voltage differential may be applied between pairs of electrode fingers to reduce the quadrature error. A microfabricated gyroscope includes a vibratory structure and interdigited electrodes having a high aspect ratio.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.