Patent · US Expired

Semiconductor substrate, semiconductor device and method of manufacturing the same

US6069394A · kind A · utility

272Cited by
6References
9Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 8, 1998
Grant dateMay 30, 2000
Priority date
Expiry dateApr 8, 2018

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01S2301/173
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A sapphire substrate, a buffer layer of undoped GaN and a compound semiconductor crystal layer successively formed on the sapphire substrate together form a substrate of a light emitting diode. A first cladding layer of n-type GaN, an active layer of undoped In.sub.0.2 Ga.sub.0.8 N and a second cladding layer successively formed on the compound semiconductor crystal layer together form a device structure of the light emitting diode. On the second cladding layer, a p-type electrode is formed, and on the first cladding layer, an n-type electrode is formed. In a part of the sapphire substrate opposing the p-type electrode, a recess having a trapezoidal section is formed, so that the thickness of an upper portion of the sapphire substrate above the recess can be substantially equal to or smaller than the thickness of the compound semiconductor crystal layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.