Crystal growth observing apparatus using a scanning tunneling microscope
US6074485A · kind A · utility
1Cited by
3References
3Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 8, 1998 |
| Grant date | Jun 13, 2000 |
| Priority date | — |
| Expiry date | Dec 8, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T117/1004
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A STM drive mechanism capable of moving a scanning tunneling microscope (STM) incorporated with a molecular beam epitaxy (MBE) device in the MBE device under vacuum and a substrate holder with a wide clearance formed between a substrate heating system and the substrate holder are provided. The STM is protected by a heat insulating shield from high vapor pressure atmosphere and radiant heat according to substrate heating.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.