Patent · US Expired

Surface mount die: wafer level chip-scale package and process for making the same

US6075290A · kind A · utility

136Cited by
1References
18Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 26, 1998
Grant dateJun 13, 2000
Priority date
Expiry dateFeb 26, 2018

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/14
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

Disclosed is an IC package. The IC package includes a die having a plurality of conductive pads. A passivation layer is formed over the conductive pads such that the passivation layer has a plurality of passivation vias. Each passivation via is positioned over an associated one of the conductive pads. A resilient protective layer is formed over the passivation layer. The resilient protective layer has a plurality of resilient vias, wherein each resilient via is associated with an associated passivation via. A plurality of under bump pads are in electrical contact with the conductive pads, and each under bump pad is associated with one of the resilient vias. A plurality of contact bumps are formed over the plurality of under bump pads such that each one of the contact bumps is electrically coupled with a selected one of the under bump pads and such that each contact bump is electrically coupled with a selected one of the conductive pads. The resilient protective layer is arranged to absorb stresses introduced at the contact bumps when the IC package is attached to an external substrate; the contact bumps are formed from a material that facilitates absorption of stresses by the resil…

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.