Device in a semiconductor manufacturing installation in particular for integrated circuits

US6075358A · kind A · utility

Assignee

• Siemens Aktiengesellschaft · DE

Inventors

• Wolfgang Hetzel · Nattheim, DE
• Norbert Martin Haueis · Kareth, DE
• Friedrich Wanninger · Birkenfeld, DE
• Georg Schlaffer · Regensburg, DE
• Alfred Schallert · Amberg, DE
• Peter Eigenstetter · Donaustauf, DE
• Stefan Schmausser · Ursensollen, DE

Key dates

• Filing date: Jan 9, 1998
• Grant date: Jun 13, 2000
• Expiry date: Jan 9, 2018

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/67282
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

The fully automatic conveying system, a so-called handler, picks up, tests, inscribes, and packages finished mounted components in a semiconductor manufacturing plant. Each component is assigned a dedicated data record and it is accordingly automatically deposited in a selected package. The component is thus inscribed, classified, and packaged with a specific class identifier in dependence on the preceding tests.