Method for detection of defects in the inspection of structured surfaces

US6075880A · kind A · utility

Assignee

• Jenoptik Technologie GmbH · DE

Inventors

• Dietmar Kollhof · Ilmenau, DE
• Joachim Wienecke · Jena, DE
• Karl-Heinz Franke · Ilmenau, DE
• Michael A. Graef · Gräfelfing, DE
• Heiko-Ulrich Klaus Kempe · Geraberg, DE

Key dates

• Filing date: Feb 28, 1995
• Grant date: Jun 13, 2000
• Expiry date: Feb 28, 2015

Classification

• Technology area (CPC G): Physics
• CPC primary: G06T2207/30148
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The object of a method for detecting defects in the inspection of structured surfaces is to ensure a detection of defects which is not dependent on the number of structuring planes and includes structure features in real-time operation for separating defects from good structures. From image point classification in which zones of a recorded image which have similar image point features are assembled, a gray-value intermediate image containing edge structures and corner structures is generated from the image and the behavior of the image point features of every image point in the intermediate image is analyzed with respect to its neighboring image points. The method is used predominantly in statistical process control in the production process of masks, LCD's, printed circuit boards and semiconductor wafers.