Jenoptik Technologie GmbH
9Patents
0Active
9Granted
29Portfolio score
Filing activity: Dec 15, 1994 → Apr 28, 1995
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5655869A | Device for coupling loading and unloading devices with semiconductor processing machines | Emerging Cross-Sectional Technologies | 42 | Expired |
| US6075880A | Method for detection of defects in the inspection of structured surfaces | Physics | 27 | Expired |
| US5581383A | Arrangement for optical autocorrelation | Physics | 20 | Expired |
| US5566023A | Stepped lens with Fresnel surface structure produced by lithography and process for manufacturing of same | Physics | 10 | Expired |
| US5715929A | Charging device for semiconductor processing installations | Emerging Cross-Sectional Technologies | 6 | Expired |
| US5575372A | Device for preventing shearing or pinching of a foreign object | Fixed Constructions | 5 | Expired |
| US5636724A | Device for transferring a transport object between two end positions | Emerging Cross-Sectional Technologies | 4 | Expired |
| US5535250A | Device for manipulating a synchrotron beam bundle | Physics | 3 | Expired |
| US5515410A | Irradiation device for deep x-ray lithography | Physics | 1 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.