Process of controlling particle size of naphthoquinone diazide esters
US6077942A · kind A · utility
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Key dates
| Filing date | Dec 22, 1997 |
| Grant date | Jun 20, 2000 |
| Priority date | — |
| Expiry date | Dec 22, 2017 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC07C303/44
- WIPO fieldOrganic fine chemistry
- WIPO sectorChemistry
Abstract
A process for producing a naphthoquinone diazide ester of a phenolic compound that is useful in a photoresist composition, which process comprises providing a naphthoquinone diazide ester solution in an organic polar solvent; adding the resulting naphthoquinone diazide ester solution to a precipitation bath that is maintained at a temperature of from about 0.degree. C. to about -30.degree. C.; and filtering the resulting naphthoquinone diazide ester.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.