Mechanically coupled alternatively usable cantilever structures for scanning a surface
US6079255A · kind A · utility
49Cited by
4References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 14, 1998 |
| Grant date | Jun 27, 2000 |
| Priority date | — |
| Expiry date | Sep 14, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/873
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention concerns a cantilever arrangement for scanning a surface. This arrangement comprises a first cantilever having a first probe and a second cantilever having a second probe. Both cantilevers are mechanically coupled such that the second cantilever follows the movement of the first cantilever, i.e. the deflection of the first cantilever defines the deflection of the second cantilever.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.