Mask and method for modification of a surface
US6080513A · kind A · utility
3Cited by
2References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 4, 1998 |
| Grant date | Jun 27, 2000 |
| Priority date | — |
| Expiry date | May 4, 2018 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/042
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A surface of a substrate (3) is to be exposed to a medium (11) directed towards said surface and which modifies said surface. A mask (4) to be used therefor has at least one opening (9) through which said medium (11) is allowed to reach said surface. The opening (9) is located in a protrusion (10) of said mask (4) which is directed versus said surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.