Patent · US Expired

Power MOSFET device having low on-resistance and method

US6084268A · kind A · utility

114Cited by
2References
14Claims
0Family size

Assignee

Inventors

Key dates

Filing dateNov 3, 1997
Grant dateJul 4, 2000
Priority date
Expiry dateNov 3, 2017

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D64/516

Abstract

A power MOSFET device (40) includes one or more localized regions of doping (61,62,63) formed in a more lightly doped semiconductor layer (42). The one or more localized regions of doping (61,62,63) reduce inherent resistances between the source regions (47,48) and the drain region (41) of the device. The one or more localized regions of doping (61,62,63) are spaced apart from the body regions (44,46) to avoid detrimentally impacting device breakdown voltage. In an alternative embodiment, a groove (122) or trench (152) design is incorporated to reduce JFET resistance (34). In a further embodiment, a gate dielectric layer having a thick portion (77,97,128,158) and thin portions (76,126,156) is incorporated to enhance switching characteristics and/or breakdown voltage.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.