Linear motor, and stage device and exposure apparatus provided with the same
US6084319A · kind A · utility
75Cited by
10References
41Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 15, 1997 |
| Grant date | Jul 4, 2000 |
| Priority date | — |
| Expiry date | Oct 15, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02K41/031
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A linear motor including a coil and a jacket which covers the coil and allows a cooling medium to be supplied through a space in the jacket. The jacket is made of an insulating material, such as a ceramic material or a high-polymer resinous material. The linear motor can include a reinforcing member in the jacket for strengthening the jacket against the pressure of the cooling medium. Also disclosed are a stage device, an exposure apparatus, and a device producing method using such a linear motor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.