Patent · US Expired

Method and apparatus for applying a substance to a surface

US6086269A · kind A · utility

1Cited by

6References

15Claims

0Family size

Assignee

Siemens Aktiengesellschaft · DE

Inventors

Stephan Bradl · Regensburg, DE
Elke Hietschold · Dresden, DE

Key dates

Filing date	May 5, 1998
Grant date	Jul 11, 2000
Priority date	—
Expiry date	May 5, 2018

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10S134/902
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A method and an apparatus apply a substance, especially a developer, to a surface through jets. Each jet carries the substance to be applied to a predetermined portion of the surface, and each jet essentially applies a predetermined quantity of substance per unit of surface area, wherein at least one jet applies a maximum quantity of substance per unit of surface area to the surface. The quantity of substance per unit of surface area applied by each jet is selected in such a way that it is greater than 1% of the maximum quantity of substance per unit of surface area.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.