Method and device for control of a vacuum vaporization process

US6086963A · kind A · utility

Assignee

• Max-Planck-Gesellschaft zur Föderung der Wissenschaften e.V. · US

Inventors

• Klaus Goedicke · Dresden, DE
• Bert Scheffel · Dresden, DE
• Christoph Metzner · Dresden, DE

Key dates

• Filing date: Sep 2, 1998
• Grant date: Jul 11, 2000
• Expiry date: Sep 2, 2018

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C03C17/002
• WIPO field: Materials, metallurgy
• WIPO sector: Chemistry

Abstract

The vacuum vaporization process is controlled using recoil force of the evaporating particles as the measurable variable by measuring the rate of evaporation. The vaporizer vessel is arranged in the vacuum chamber with the aid of force transducers, and the signal emanating from the force transducers can be used to control, for example, the electrical energy to heat the vaporizing material, the beam deflection or the fill level in the vaporizer, with the sensors not coming into contact with the vapor. Vacuum vaporization processes, particularly for vapor deposition of functional coatings on tools and sheet substrates, can be controlled with this method and device.