Glass substrate inspection apparatus
US6088092A · kind A · utility
33Cited by
4References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 21, 1999 |
| Grant date | Jul 11, 2000 |
| Priority date | — |
| Expiry date | Jun 21, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/958
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optical inspection station for inspecting a substrate. The substrate may include a first surface and a second surface. Light is reflected from both the first and second surfaces of the substrate. The light reflected from the first surface is detected by a light detector. A controller may determine a surface characteristic of the first surface from the detected light. The system may include a spatial filter that filters the light reflected from the second surface. The spatial filter eliminates the optical noise that may be created by the light reflected from the second surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.