Method and device for automatic relative adjustment of samples in relation to an ellipsometer

US6091499A · kind A · utility

Assignee

• Nanophotonics Co., Ltd. · DE

Inventors

• Michael Abraham · Mainz, DE
• Oliver Depner · Saulheim, DE
• Matthias Eberhardt · Lörzweiler, DE

Key dates

• Filing date: Apr 14, 1999
• Grant date: Jul 18, 2000
• Expiry date: Apr 14, 2019

Classification

• Technology area (CPC G): Physics
• CPC primary: G01J4/00
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Normally, repeated calibration measurements are necessary for the adjustment of the sample and ellipsometer. To achieve an automatic relative adjustment, a sample position detection system that can be adjusted in relation to the ellipsometer and locked in is assigned to the ellipsometer, and where the detection system is connected to an adjusting system that affects the sample table and/or the entire system detection system/ellipsometer. The method for automatic relative adjustment is provided for, that by initially using one sample, the system sample/ellipsometer is adjusted via the symmetry of the detector signal of the ellipsometer, and that the sample position detection system is adjusted and subsequently locked in with the ellipsometer. With all subsequent samples, a relative adjustment of sample and ellipsometer detection system is performed using the signals of the detection system. In particular, the measurements can be performed without moving the sample itself because the adjustment can also be carried out through a single movement of the ellipsometer detection system.