Drive checking system for fan filter units in clean room
US6093229A · kind A · utility
8Cited by
2References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 14, 1998 |
| Grant date | Jul 25, 2000 |
| Priority date | — |
| Expiry date | Oct 14, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S55/34
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A fan drive checking system, for an air conditioning system in a clean room having a fan filter unit (FFU), includes a flow sensor for sensing air flow inside a housing of a FFU. The sensor provides a sensor signal indicative of normal and adverse flow conditions in the housing. A control portion in data communication with the sensor outputs a control signal responsive to the sensing signal. An alarm in data communication with the control portion provides a warning when the control signal indicates the adverse flow condition.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.