Yo-Han Ahn
19Patents
7h-index
45Co-inventors
62Inventor score
Filing activity: Mar 19, 1997 → Sep 21, 2011
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7850449B2 | Heat treatment equipment | Electricity | 449 | Active |
| US6402598B1 | Chemical mechanical polishing apparatus and method of washing contaminants off of the polishing head thereof | Electricity | 30 | Expired |
| US6996453B2 | Substrate processing apparatus and method of processing substrate while controlling for contamination in substrate transfer module | Emerging Cross-Sectional Technologies | 29 | Expired |
| US6036781A | Apparatus for guiding air current in a wafer loading chamber for chemical vapor deposition equipment | Emerging Cross-Sectional Technologies | 18 | Expired |
| US7258728B2 | Apparatus and method for cleaning air | Performing Operations; Transporting | 14 | Expired |
| US6093229A | Drive checking system for fan filter units in clean room | Emerging Cross-Sectional Technologies | 8 | Expired |
| US7065898B2 | Module for transferring a substrate | Electricity | 8 | Expired |
| US6613487B1 | Pre-alignment system of exposure apparatus having wafer cooling means and exposure method using the same | Physics | 7 | Expired |
| US6370793B1 | Apparatus for controlling the temperature of a wafer located at a pre-alignment stage | Emerging Cross-Sectional Technologies | 7 | Expired |
| US5856623A | Particle counter with sampling probe having adjustable intake area | Physics | 6 | Expired |
| US8146447B2 | Contamination analysis unit and method thereof, and reticle cleaning system | Physics | 5 | Active |
| US8585391B2 | Photomask cleaning apparatus and methods of cleaning a photomask using the same | Performing Operations; Transporting | 5 | Active |
| US6522385B2 | Air shower head of photolithography equipment for directing air towards a wafer stage | Physics | 4 | Expired |
| US8027017B2 | Substrate treating apparatus and exposing apparatus for cleaning a chuck cleaning tool with treating bath | Electricity | 3 | Active |
| US6098023A | Driving control system and monitoring device for fan filter unit in semiconductor clean room | Mechanical Engineering; Lighting; Heating | 2 | Expired |
| US7161660B2 | Photolithography system and method of monitoring the same | Physics | 0 | Expired |
| US6737206B2 | Pre-alignment system of exposure apparatus having wafer cooling means and exposure method using the same | Physics | 0 | Expired |
| US7914594B2 | Air filtering device and cleaning system of semiconductor manufacturing apparatus with the same | Emerging Cross-Sectional Technologies | 0 | Active |
| US7326284B2 | Contamination control system and air-conditioning system of a substrate processing apparatus using the same | Emerging Cross-Sectional Technologies | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.