Spin-on glass dispensing monitor
US6094142A · kind A · utility
6Cited by
3References
10Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 7, 1998 |
| Grant date | Jul 25, 2000 |
| Priority date | — |
| Expiry date | Jul 7, 2018 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB05C11/08
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A dispensing monitor used in a SOG machine to planarize a semiconductor substrate which includes: a container, a gas control valve. a gas release valve, a pressure monitor, and a pressure sensing apparatus. A chemical solution contained in the container is controlled and conveyed through the gas control valve to be sprayed onto the substrate. The pressure monitor and the pressure sensing apparatus and the gas release valve are used for monitoring the internal pressure to keep a constant pressure so that the chemical solution is precisely exported.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.