Rotation rate sensor

US6094985A · kind A · utility

Assignee

• Siemens Aktiengesellschaft · DE

Inventors

• Hergen Kapels · Neubiberg, DE
• Christofer Hierold · Munich, DE
• Max Steger · Hersbruck, DE
• Thomas Scheiter · Munich, DE
• Reinhold Noe · Paderborn, DE
• Ulrich Naher · Hersbruck, DE

Key dates

• Filing date: May 24, 1999
• Grant date: Aug 1, 2000
• Expiry date: May 24, 2019

Classification

• Technology area (CPC G): Physics
• CPC primary: G01C19/5712
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Rotation rate sensor as a micromechanical component in silicon, in which a ring with a rigid strut along a diameter is so suspended at elastic braces and anchoring arrangements on a substrate as to be able to perform rotation oscillations about its center axis and to be able to be tilted about the strut under the influence of outer torques. There are electrodes present at the ring and at the substrate, at which electrodes electrical voltages can be applied such that rotary oscillations of the ring about its center axis can be excited and rotary oscillations about the strut can be detected. To stabilize the position of the ring in the neutral position, additional electrodes can be provided at the ring and at the substrate for the generation of electrostatic forces.