Inspection apparatus with real time display
US6097204A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 27, 1996 |
| Grant date | Aug 1, 2000 |
| Priority date | — |
| Expiry date | Dec 27, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/31912
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An inspection apparatus comprises a prober section having a main chuck and a prober, and a loader section having a support table, a sub-chuck and a forceps assembly. A controller controlls the forceps assembly, the sub-chuck, the main chuck and the prober such that the forceps assembly conveys a semiconductor wafer in a cassette on the table before inspection from the cassette to the sub-chuck, the sub-chuck prealigns the semiconductor wafer, the forceps assembly conveys the prealigned semiconductor wafer to the main chuck, the prober inspects the semiconductor wafer supported by the main chuck, and then the forceps assembly conveys the inspected semiconductor wafer to the cassette. A wafer state display device is provided for performing display on a display screen so as to visually recognize whether the semiconductor wafer in the cassette is not inspected or has been inspected, and for graphically displaying movement of the semiconductor wafer between the cassette and the main chuck on the display screen in real time.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.