Pressure partition for X-ray exposure apparatus
US6097790A · kind A · utility
40Cited by
5References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 25, 1998 |
| Grant date | Aug 1, 2000 |
| Priority date | — |
| Expiry date | Feb 25, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70841
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A pressure partition includes a thin film for dividing a predetermined space into two spatial zones and a supporting device for supporting the film at an outside peripheral portion thereof. The supporting device has a curved surface for producing curvature in the outside peripheral portion of the film. The curved surface is disposed at one of the two spatial zones having a lower pressure as compared with the other, and the curved surface has a convex shape with respect to a plane intersecting the film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.