Eiji Sakamoto
53Patents
17h-index
75Co-inventors
87Inventor score
Filing activity: Oct 3, 1985 → May 20, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5231291A | Wafer table and exposure apparatus with the same | Physics | 90 | Expired |
| US5374829A | Vacuum chuck | Emerging Cross-Sectional Technologies | 84 | Expired |
| US5220171A | Wafer holding device in an exposure apparatus | Physics | 68 | Expired |
| US5063582A | Liquid cooled X-ray lithographic exposure apparatus | Physics | 66 | Expired |
| US6495847B1 | Stage control apparatus and exposure apparatus | Physics | 58 | Expired |
| US5577552A | Temperature controlling device for mask and wafer holders | Physics | 55 | Expired |
| US5093579A | Exposure apparatus with a substrate holding mechanism | Physics | 41 | Expired |
| US6097790A | Pressure partition for X-ray exposure apparatus | Physics | 40 | Expired |
| US4969168A | Wafer supporting apparatus | Electricity | 39 | Expired |
| US5113181A | Display apparatus | Physics | 38 | Expired |
| US4744637A | Liquid crystal device with a protective layer of a particular coefficient of expansion | Physics | 31 | Expired |
| US5524131A | Alignment apparatus and SOR x-ray exposure apparatus having same | Physics | 28 | Expired |
| US5138643A | Exposure apparatus | Physics | 26 | Expired |
| US6081319A | Illumination system and scan type exposure apparatus | Physics | 24 | Expired |
| US5637142A | Nonaqueous emulsified surface treating agent composition | Emerging Cross-Sectional Technologies | 24 | Expired |
| US5822389A | Alignment apparatus and SOR X-ray exposure apparatus having same | Physics | 18 | Expired |
| US5610965A | Exposure method | Physics | 17 | Expired |
| US4777117A | Process for producing color filter using alignment marks | Physics | 10 | Expired |
| US4829485A | Method of reading signals in a charge-storage line sensor in which each storage device is sequentially read and then reset during a subsequent dead time interval | Electricity | 9 | Expired |
| US5907390A | Positioning apparatus, exposure apparatus and method of manufacturing semiconductor device | Physics | 8 | Expired |
| US6829034B2 | Exposure apparatus and device manufacturing method | Physics | 7 | Expired |
| US7116501B2 | Optical element holder, exposure apparatus, and device fabricating method | Physics | 4 | Expired |
| US6293972A | Process for fluorinating cellulosic materials and fluorinated cellulosic materials | Textiles; Paper | 4 | Expired |
| US6951766B2 | Correcting device, exposure apparatus, device production method, and device produced by the device production method | Physics | 4 | Expired |
| US7265812B2 | Cooling apparatus | Physics | 3 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.