Driving control system and monitoring device for fan filter unit in semiconductor clean room
US6098023A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 29, 1997 |
| Grant date | Aug 1, 2000 |
| Priority date | — |
| Expiry date | Oct 29, 2017 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF24F11/39
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A monitoring device and a driving control system for a fan filter unit in a semiconductor clean room for monitoring the operating state of the fan filter unit. The monitoring device includes a switching section in each fan filter unit which alternately applies electrical power to one of a plurality of terminals. The switching section is responsive to a force from an air stream introduced therein via rotation of a fan in the fan filter unit. A display section in each fan filter unit is connected to the plurality of terminals which provide different signals, indicative of an on or off state of the fan, according to which of the plurality of terminals is electrically connected to the electrical power.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.