Acceleration sensor and shock detecting device using the same
US6098460A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 8, 1996 |
| Grant date | Aug 8, 2000 |
| Priority date | — |
| Expiry date | Oct 8, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49789
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A small accelaration sensor which is highly sensitive over a large frequency region and which varies little in characteristics such as sensitivity. A piezoelectric element is formed by connecting two main faces of retangular LiNbO.sub.3 piezoelectric substrates, in which the polarization axes are directed oppositely. Supporters comprising LiNbO.sub.3 directly connected to one end of the piezoelectric element. Eletrodes of chromium-gold being 0.2 .mu.m are thick are successively connected to the two main faces of the piozoelectric element and to the supporters, thus to produce a cantilever structure bimorph electromechanical transducer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.