Patent · US Expired

Device for the transfer of an object between at least two locations

US6099059A · kind A · utility

7Cited by

8References

11Claims

0Family size

Assignee

Brooks Automation GmbH · US

Inventors

Klaus Schultz · Jena, DE
Volker Weisbach · Apolda, DE
Bernd Gey · Hermsdorf, DE
Andreas Mages · Jena, DE

Key dates

Filing date	Sep 22, 1998
Grant date	Aug 8, 2000
Priority date	—
Expiry date	Sep 22, 2018

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10S414/14
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

A device for transferring an object between at least two locations with a gripper which grips the object at a handle element after it approaches the object with gripper elements has the aim of preventing deformation or destruction of the object during the approach of the gripper. This should minimize particle generation resulting from firm holding. The gripper has a sensor for detecting the object and its distance during approach, wherein the time at which the object is detected defines the determination of the remaining approach path for a controlled approach and the start of the gripping process.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.