Dispensing system of a coater
US6099646A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Nov 3, 1998 |
| Grant date | Aug 8, 2000 |
| Priority date | — |
| Expiry date | Nov 3, 2018 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB05C11/1002
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A dispensing system used in a spin coater is provided to transport a solvent to a wafer. The dispensing, system includes a switch valve, a sucking-back valve, a solenoid valve, a speed control unit of the sucking-back valve, and a speed control unit of the switch valve. The switch valve controls a solvent dispensing status. The sucking-back valve receives the solvent from the switch valve and exports the solvent to a wafer. The solenoid valve controls the switch valve and the sucking-back valve. The speed control unit of the switch valve is coupled between the switch valve and the solenoid valve and is used for a control of action speed on the switch valve. The speed control unit of the sucking-back valve is coupled between the switch valve and the sucking-back valve, and is used for a control of action speed of the sucking-back valve by a sufficient delay time of action.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.