Patent · US Expired

Objective lens

US6104034A · kind A · utility

14Cited by

5References

13Claims

0Family size

Assignee

ADVANTEST CORPORATION · JP

Inventors

Jürgen Frosien · Riemerling, DE
Stefan Lanio · Erding, DE
Gerald Schonecker · Munich, DE

Key dates

Filing date	Jul 9, 1998
Grant date	Aug 15, 2000
Priority date	—
Expiry date	Jul 9, 2018

Classification

Technology area (CPC H)Electricity
CPC primaryH01J37/145
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

The invention relates to an objective lens for influencing a particle beam, particularly an electron beam with a magnetic single-pole lens and an electrostatic lens having a first and a second electrode which can be supplied with different potentials. The objective lens is characterized in that the electrostatic lens is disposed after the magnetic single-pole lens in the direction of the particle beam.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.