Semiconductor device testing apparatus
US6104204A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | May 12, 1998 |
| Grant date | Aug 15, 2000 |
| Priority date | — |
| Expiry date | May 12, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/0458
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An IC tester is provided which is capable of preventing the temperature of an IC heated to a predetermined temperature from falling during the test. A box-like housing 70 constructed of a thermally insulating material is mounted on a performance board PB. An IC socket SK and a socket guide 35 are accommodated in a space bounded by the box-like housing 70 and the performance board PB. A through-aperture 71 is formed in the top wall of the housing 70 for passing an IC under test carried by a movable rod 60R of a Z-axis driver into and out of the interior of the housing 70. An opening/closing plate 72 is disposed over the housing 70 for movement in a horizontal direction. This plate 72 is adapted to close the through-aperture 71 of the housing 70 when the movable rod 60R is outside of the housing to thereby maintain the interior of the box-like 70 in an almost thermally insulated condition. In addition, a cover member 64 is disposed for closing the through-aperture 72A in the plate 72 when the IC under test is in contact with the IC socket to aid in maintaining the interior of the housing in a thermally insulated condition.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.