Acoustically agitated delivery
US6106374A · kind A · utility
2Cited by
11References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 16, 1998 |
| Grant date | Aug 22, 2000 |
| Priority date | — |
| Expiry date | Jul 16, 2018 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24B57/02
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A chemical mechanical polishing apparatus comprises a delivery system for supplying a slurry, wherein the slurry includes suspended particles and at least one acoustic element, connected to the delivery system, the acoustic element generating sound waves for agitating the slurry and maintaining the particles in suspension.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.