Karl E. Boggs
21Patents
10h-index
65Co-inventors
74Inventor score
Filing activity: Jan 22, 1998 → Jan 13, 2015
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7300601B2 | Passivative chemical mechanical polishing composition for copper film planarization | Electricity | 30 | Expired |
| US6325696A | Piezo-actuated CMP carrier | Performing Operations; Transporting | 26 | Expired |
| US7736405B2 | Chemical mechanical polishing compositions for copper and associated materials and method of using same | Electricity | 22 | Expired |
| US8304344B2 | High throughput chemical mechanical polishing composition for metal film planarization | Electricity | 22 | Active |
| US9074170B2 | Copper cleaning and protection formulations | Chemistry; Metallurgy | 20 | Active |
| US8685909B2 | Antioxidants for post-CMP cleaning formulations | Chemistry; Metallurgy | 19 | Active |
| US7361603B2 | Passivative chemical mechanical polishing composition for copper film planarization | Electricity | 18 | Expired |
| US8618036B2 | Aqueous cerium-containing solution having an extended bath lifetime for removing mask material | Physics | 11 | Active |
| US6087191A | Method for repairing surface defects | Electricity | 11 | Expired |
| US9074169B2 | Lithographic tool in situ clean formulations | Chemistry; Metallurgy | 10 | Active |
| US6296717A | Regeneration of chemical mechanical polishing pads in-situ | Electricity | 9 | Expired |
| US5972787A | CMP process using indicator areas to determine endpoint | Electricity | 8 | Expired |
| US6102776A | Apparatus and method for controlling polishing of integrated circuit substrates | Performing Operations; Transporting | 7 | Expired |
| US8236695B2 | Method of passivating chemical mechanical polishing compositions for copper film planarization processes | Electricity | 5 | Active |
| US9522773B2 | Substantially rigid collapsible liner and flexible gusseted or non-gusseted liners and methods of manufacturing the same and methods for limiting choke-off in liners | Performing Operations; Transporting | 4 | Active |
| US9528078B2 | Antioxidants for post-CMP cleaning formulations | Chemistry; Metallurgy | 2 | Active |
| US6106374A | Acoustically agitated delivery | Performing Operations; Transporting | 2 | Expired |
| US8539781B2 | Component for solar adsorption refrigeration system and method of making such component | Mechanical Engineering; Lighting; Heating | 2 | Active |
| USRE46427E1 | Antioxidants for post-CMP cleaning formulations | General | 1 | Active |
| US6857434B2 | CMP slurry additive for foreign matter detection | Electricity | 0 | Expired |
| US9132412B2 | Component for solar adsorption refrigeration system and method of making such component | Mechanical Engineering; Lighting; Heating | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.