Patent · US Expired

Electron beam lens

US6107633A · kind A · utility

15Cited by

4References

16Claims

0Family size

Assignee

ADVANTEST CORPORATION · JP

Inventors

Jürgen Frosien · Riemerling, DE
Stefan Lanio · Erding, DE
Gerald Schonecker · Munich, DE

Key dates

Filing date	Jul 9, 1998
Grant date	Aug 22, 2000
Priority date	—
Expiry date	Jul 9, 2018

Classification

Technology area (CPC H)Electricity
CPC primaryH01J37/141
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

An electron beam lens has a magnetic lens provided with first and second pole pieces for influencing an electron beam and forming a magnetic field between the two pole pieces. A third pole piece is provided, but is not in magnetic contact with the two other pole pieces. The third pole piece is immersed in the magnetic field formed between the first and second pole pieces and extracts a part of such magnetic field. Also disclosed is a cathode lens and an electron beam device for use with such an electron beam lens.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.