Three-dimensional shape measuring apparatus
US6108090A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Mar 8, 1999 |
| Grant date | Aug 22, 2000 |
| Priority date | — |
| Expiry date | Mar 8, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/026
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A three-dimensional shape measuring apparatus using a confocal imaging system which has a new means for changing the distance in the Z direction between the object and the object-position-in-focus, instead of an object stage moved in the Z direction. This means shifts the object-position-in-focus in the Z direction by refraction. One means inserts a plurality of transparent flat plates between the objective lens and the object-position-in-focus in turn. Another means uses a transparent flat plate made of a material for which the refractive index changes according to the voltage applied and is disposed between the object and the object-position-in-focus.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.