Probabilistic dispatching method and arrangement
US6108585A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 12, 1997 |
| Grant date | Aug 22, 2000 |
| Priority date | — |
| Expiry date | Dec 12, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/02
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A probabilistic dispatching method and arrangement for directing the movement of wafers in a manufacturing process. In a manufacturing process, some process steps may be performed by tools at alternate locations. Delivery of the material from one manufacturing process step to the next occurs via a rail for transporting the material and stockers for holding the material until the processing can commence. While awaiting processing, material may be moved from one stocker to a stocker at an alternate location and then removed for processing. A distribution of removal events is maintained for process steps having alternate locations, wherein a removal event refers to removal of material from a stocker for processing. When material is returned to a stocker for delivery to another stocker to await a subsequent processing step, the other stocker is identified as a function of the distribution of removal events for the subsequent processing step.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.