Emission microscopy system and method
US6112004A · kind A · utility
8Cited by
17References
15Claims
0Family size
Inventor
Key dates
| Filing date | Oct 28, 1998 |
| Grant date | Aug 29, 2000 |
| Priority date | — |
| Expiry date | Oct 28, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S385/902
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An emission microscopy system with a coherent illuminator system and method wherein an incident energy beam is directed at an end of image conduit rotating around its axis. The incident energy beam may be generated by a laser or similar radiation source. A substantially cylindrically uniform radiation spot is obtained from the other end of the image conduit, which may be guided by waveguide means to an emission microscope used in IC failure analysis.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.