Stackable layers containing encapsulated chips
US6117704A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 31, 1999 |
| Grant date | Sep 12, 2000 |
| Priority date | — |
| Expiry date | Mar 31, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/18162
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method and structure are disclosed which involve the re-wafering of previously processed and tested IC chips. The chips are encapsulated in supporting non-conductive material in a neo-wafer, so that they may be further processed preparatory to dicing layer units from the neo-wafer, which layer units are ready for stacking in a three-dimensional electronic package. Although the layer areas are the same, different stacked layers may contain different sized IC chips, and a single layer may encapsulate a plurality of chips. Precision of location of the separate IC chips in the neo-wafer is insured by use of photo-patterning means to locate openings in the neo-wafer into which extend conductive bumps on the chips. The neo-wafer is preferably formed with separate cavities in which the chips are located before they are covered with the encapsulating material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.