Method for improved metal oxide bonding of optical elements
US6117794A · kind A · utility
18Cited by
5References
7Claims
0Family size
Assignee
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Key dates
| Filing date | Jan 16, 1998 |
| Grant date | Sep 12, 2000 |
| Priority date | — |
| Expiry date | Jan 16, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S5/0683
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method of preparing a supporting substrate of an optical subassembly for metal-oxide bonding an optical element to the substrate. The method includes providing a supporting substrate including a metalized region for metal-oxide bonding an optical element to the substrate and rinsing the substrate in a potassium hydroxide solution. The potassium hydroxide solution removes any excess metal oxide or other contaminants from the surface of the metalized region.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.