Magnetic frictionless gimbal for a polishing apparatus
US6121142A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Sep 14, 1998 |
| Grant date | Sep 19, 2000 |
| Priority date | — |
| Expiry date | Sep 14, 2018 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24B47/00
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
The present invention provides, for use with a polishing apparatus, a carrier structure comprising a first magnetic body, a second magnetic body, and a retaining ring. In one advantageous embodiment, the first magnetic body has a first side coupleable to the polishing apparatus, and a second side. The second magnetic body has a first side proximate and juxtaposed the second side of the first magnetic body. The second magnetic body is coupled to the first magnetic body to allow undulant motion with respect to the first magnetic body. The first and second magnetic bodies are configured to have a like polarity. The retaining ring is coupled to the second side of the second magnetic body and forms a retaining cavity configured to receive an object to be polished. Thus, the first and second magnetic bodies may cooperate to form a frictionless gimbal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.