Photodefinable dielectric compositions comprising polycyclic polymers
US6121340A · kind A · utility
22Cited by
9References
33Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 4, 1997 |
| Grant date | Sep 19, 2000 |
| Priority date | — |
| Expiry date | Nov 4, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/0045
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention relates to a photodefinable dielectric composition comprising a photoinitiator and a polycyclic addition polymer comprising polycyclic repeating units that contain pendant silyl functionalities containing hydrolyzable substituents. Upon exposure to a radiation source the photoinitiator catalyzes the hydrolysis of the hydrolyzable groups to effect the cure of the polymer and adhesion of the polymer to desired substrates.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.