Shield to prevent cryopump charcoal array from shedding during cryo-regeneration
US6122921A · kind A · utility
135Cited by
18References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 19, 1999 |
| Grant date | Sep 26, 2000 |
| Priority date | — |
| Expiry date | Jan 19, 2019 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04B37/085
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
The present invention provides a regeneration shield 22 for a vacuum system, typically used in the processing of integrated circuits. The regeneration shield protects fragile arrays 13, having a dislocatable material 16, such as charcoal, in a high vacuum pump 4 from volatile regeneration gases, which impinge the fragile material on the array and dislocate that material to cause pumping inefficiencies and scrap. The shield may be planar, concave, or convex and may have sides. The shield may also have inwardly and outwardly extending flanges.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.