Electronic component for measuring acceleration
US6122963A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jan 22, 1999 |
| Grant date | Sep 26, 2000 |
| Priority date | — |
| Expiry date | Jan 22, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P15/125
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An electronic component includes a support substrate (101), a fixed electrode (113) overlying the support substrate (101), a movable electrode (123, 423) overlying the support substrate and the first electrode (113) wherein the first and second electrodes (113, 123, and 423) form a capacitor with a sensing area, an anchor (122, 422) coupled to the support substrate (101), and beams (125, 425) coupling different attachment points (129) of the second electrode (123, 423) to the anchor (122, 422) wherein the different attachment points (129) form a simply connected polygon and wherein a portion of the sensing area is located within the simply connected polygon.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.