Patent · US Expired

Micromechanical comb structure

US6122964A · kind A · utility

43Cited by

8References

10Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Jens Mohaupt · Neckartenzlingen, DE
Markus Lutz · Palo Alto, US

Key dates

Filing date	Feb 25, 1999
Grant date	Sep 26, 2000
Priority date	—
Expiry date	Feb 25, 2019

Classification

Technology area (CPC G)Physics
CPC primaryG01P2015/0814
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Micromechanical comb structure includes a first comb device having a plurality of prongs and a second comb device having a plurality of prongs. The prongs of the first comb device and the prongs of the second comb device mesh with one another so that they are arranged side-by-side in pairs to form measuring capacitors. The prongs of at least one of the comb devices are designed to produce a variation in the mechanical natural frequencies of the prongs.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.