Substrate holder having vacuum holding and gravity holding
US6123502A · kind A · utility
13Cited by
11References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 8, 1997 |
| Grant date | Sep 26, 2000 |
| Priority date | — |
| Expiry date | Jul 8, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/141
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A substrate processing apparatus having a substrate transport with substrate holders. The holders are adapted to vacuum hold substrates and thereby allow for rapid movement of the substrates without risk that the substrates will move off of the holders. If vacuum holding of a substrate on a holder fails, the movement of the substrate holder is automatically changed to provide a less rapid gravity only holding of the substrate on the holder.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.