Robot having a centering and flat finding means
US6126380A · kind A · utility
27Cited by
5References
13Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 4, 1998 |
| Grant date | Oct 3, 2000 |
| Priority date | — |
| Expiry date | Aug 4, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/136
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present invention is a wafer handling robot which does not require a second mechanism for performing the task of pre-alignment. The robot uses the moving elements of the wafer handling robot which perform the wafer handling tasks to perform the tasks of centering and notch or flat finding of a wafer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.