Gary Hillman
25Patents
10h-index
10Co-inventors
72Inventor score
Filing activity: May 11, 1976 → Dec 7, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US4062463A | Automated single cassette load mechanism for scrubber | Emerging Cross-Sectional Technologies | 53 | Expired |
| US5094884A | Method and apparatus for applying a layer of a fluid material on a semiconductor wafer | Emerging Cross-Sectional Technologies | 50 | Expired |
| US6036426A | Wafer handling method and apparatus | Emerging Cross-Sectional Technologies | 41 | Expired |
| US4856456A | Apparatus and method for the fluid treatment of a workpiece | Performing Operations; Transporting | 29 | Expired |
| US6126380A | Robot having a centering and flat finding means | Emerging Cross-Sectional Technologies | 27 | Expired |
| US4190015A | Apparatus for dispensing liquid to spinning workpieces | Performing Operations; Transporting | 26 | Expired |
| US4281031A | Method and apparatus for processing workpieces | Emerging Cross-Sectional Technologies | 22 | Expired |
| US6059888A | Wafer cleaning system | Performing Operations; Transporting | 21 | Expired |
| US4885075A | Cooling device for a sputter target and source | Chemistry; Metallurgy | 14 | Expired |
| US4685852A | Process apparatus and method and elevator mechanism for use in connection therewith | Emerging Cross-Sectional Technologies | 13 | Expired |
| US4109337A | Automated two-sided cleaning apparatus | Performing Operations; Transporting | 9 | Expired |
| US5953828A | Silicon substrate cleaning apparatus | Electricity | 8 | Expired |
| US6666949B1 | Uniform temperature workpiece holder | Chemistry; Metallurgy | 7 | Expired |
| US4592926A | Processing apparatus and method | Emerging Cross-Sectional Technologies | 7 | Expired |
| US5735962A | Silicon substrate cleaning method and apparatus | Electricity | 7 | Expired |
| US4519526A | Method and apparatus for dispensing liquid | Physics | 7 | Expired |
| US8906452B1 | Rapid coating of wafers | Physics | 6 | Active |
| US10537031B2 | Reflow soldering apparatus, system and method | Performing Operations; Transporting | 5 | Active |
| US4517752A | Splash retarder | Mechanical Engineering; Lighting; Heating | 3 | Expired |
| US6794300B1 | Mechanically scanned wet chemical processing | Electricity | 2 | Expired |
| US10994300B2 | Method and/or system for coating a substrate | Electricity | 0 | Active |
| US11020766B2 | Spin coating apparatus, system, and method | Performing Operations; Transporting | 0 | Active |
| US10535538B2 | System and method for heat treatment of substrates | Electricity | 0 | Active |
| US12283499B2 | Method and/or system for coating a substrate | Performing Operations; Transporting | 0 | Active |
| US11532494B2 | System for coating a substrate | Performing Operations; Transporting | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.